| 论文编号: | |||||||||
| 作者: | Jiang, P | ||||||||
| 刊物名称: | APPLIED SURFACE SCIENCE | ||||||||
| 所属学科: | Chemistry, Physical; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter | ||||||||
| 论文题目英文: | Pattern design in large area using octadecyltrichlorosilane self-assembled monolayers as resist material | ||||||||
| 年: | 2006 | ||||||||
| 卷: | 252 | ||||||||
| 期: | 12 | ||||||||
| 页: | 4230 | ||||||||
| 联系作者: | Jiang, P | ||||||||
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| 影响因子: | |||||||||
| 参与作者: | Jiang, P.Li, SY.Sugimura, H.Takai, O | ||||||||
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